Mask fabrication results using new laser writing system: Sigma7300 [6283-14]
- Author(s):
Lee, -J. H. Nam, -S. D. Lee, -H. S. Kim, -S. H. Han, -S. H. Kim, -G. B. Choi, -W. S. Han, -S. W. ( Samsung Electronics Co., Ltd. (South Korea) ) - Publication title:
- Photomask and Next-Generation Lithography Mask Technology XIII
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6283
- Pub. Year:
- 2006
- Pt.:
- 1
- Page(from):
- 62831J
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819463586 [0819463582]
- Language:
- English
- Call no.:
- P63600/6283
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Feasibility study of mask fabrication in double exposure technology [6349-67]
SPIE - The International Society of Optical Engineering |
7
Conference Proceedings
Study of higher electron beam energy for the mask production for 30 nm node technology [6283-06]
SPIE - The International Society of Optical Engineering |
2
Conference Proceedings
Required mask specification for mass production devices below 65-nm design node [6349-81]
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
3
Conference Proceedings
The characterization of line-width in mask using spectrophotometry [6283-51]
SPIE - The International Society of Optical Engineering |
9
Conference Proceedings
EUV mask pattern inspection for memory mask fabrication in 45-nm node and below [6349-95]
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
11
Conference Proceedings
Highly accurate modeling by using 2-dimensional calibration data set for model-based OPC verification [6283-104]
SPIE - The International Society of Optical Engineering |
6
Conference Proceedings
Laser output power stabilization for circular laser writing systems by using acousto-optic modulator
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |