Pellicle-induced aberrations and apodization in hyper NA optical lithography [6283-115]
- Author(s):
- Bubke, K. ( Advanced Mask Technology Ctr. GmbH and Co. KG (Germany) )
- Alles, B ( Technische Univ. Munchen (Germany) )
- Cotte, E.
- Sczyrba, M.
- Pierrat, C. ( Advanced Mask Technology Ctr. GmbH and Co. KG (Germany) )
- Publication title:
- Photomask and Next-Generation Lithography Mask Technology XIII
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6283
- Pub. Year:
- 2006
- Pt.:
- 1
- Page(from):
- 628318
- Page(to):
- 628318
- Pages:
- 1
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819463586 [0819463582]
- Language:
- English
- Call no.:
- P63600/6283
- Type:
- Conference Proceedings
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