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A self-consistent model for the HCI dc glow discharge: plasma parameters and active particles kinetics [6260-09]

Author(s):
Publication title:
Micro- and Nanoelectronics 2005
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6260
Pub. Year:
2006
Page(from):
626009
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819463258 [0819463256]
Language:
English
Call no.:
P63600/6260
Type:
Conference Proceedings

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