FIB based measurement of local residual stresses on microsystems (Invited Paper) [6175-06]

FIB based measurement of local residual stresses on microsystems (Invited Paper) [6175-06]

Author(s):

Vogel, D. ( Fraunhofer IZM (Germany) )

Sabate, N. ( Ctr. Nacional de Microelectronica, CSIC (Spain) )

Gollhardt, A. ( Fraunhofer IZM (Germany) )

Keller, J. ( AMIC GmbH (Germany) )

Auersperg, J. ( AMIC GmbH (Germany) )

Michel, B. ( Fraunhofer IZM (Germany) )

1 more

Publication title:

Testing, Reliability, and Application of Micro- and Nano-Material Systems IV

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6175

Pub. Year:

2006

Page(from):

617505

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819462282 [0819462284]

Language:

English

Call no.:

P63600/6175

Type:

Conference Proceedings

Details

TDL ID:	ZA00016206
Series ID:	PA00000029
Conf. info. (Name):	Smart Structures : Testing, Reliability, and Application of Micro-and Nano-Material Systems
Conf. info. (Number):	2006 : 4th
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	2006.02.28-2006.03.02

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