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Nanoscale deformation measurements for reliability assessment of material interfaces [6175-05]

Author(s):
  • Keller, J. ( Fraunhofer Institute for Reliability and Microintegration (Germany) and Angewandte Micro-Messtechnik GmbH (Germany) )
  • Gollhardt, A. ( Fraunhofer Institute for Reliability and Microintegration (Germany) )
  • Vogel, D. ( Fraunhofer Institute for Reliability and Microintegration (Germany) )
  • Michel, B. ( Fraunhofer Institute for Reliability and Microintegration (Germany) )
Publication title:
Testing, Reliability, and Application of Micro- and Nano-Material Systems IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6175
Pub. Year:
2006
Page(from):
617504
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819462282 [0819462284]
Language:
English
Call no.:
P63600/6175
Type:
Conference Proceedings

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