A comparative study of MOEM pressure sensors using MZI, DC, and racetrack resonator IO structures (Invited Paper) [6172-47]

A comparative study of MOEM pressure sensors using MZI, DC, and racetrack resonator IO structures (Invited Paper) [6172-47]

Author(s):

Selvarajan, A. ( Indian Institute of Science (India) )
Pattnaik, P. K. ( Indian Institute of Science (India) )
Badrinarayana, T. ( Indian Institute of Science (India) )
Srinivas, T. ( Indian Institute of Science (India) )

Publication title:

Smart structures and materials 2006 : Smart electronics, MEMS, BioMEMS, and nanotechnology : 27 February-1 March 2006, San Diego, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6172

Pub. Year:

2006

Page(from):

61721A

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819462251 [081946225X]

Language:

English

Call no.:

P63600/6172

Type:

Conference Proceedings

Details

TDL ID:	ZA00016203
Series ID:	PA00000029
Conf. info. (Name):	Smart structures and materials
Conf. info. (Number):	2006
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	2006.02.27-2006.03.01

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