Nickel electrodeposition studies for high-aspect-ratio microstructure fabrication for MEMS [6172-14]
- Author(s):
- Xin, T. ( Louisiana State Univ. (USA) )
- Ajmera, P. K. ( Louisiana State Univ. (USA) )
- Publication title:
- Smart structures and materials 2006 : Smart electronics, MEMS, BioMEMS, and nanotechnology : 27 February-1 March 2006, San Diego, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6172
- Pub. Year:
- 2006
- Page(from):
- 61720E
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819462251 [081946225X]
- Language:
- English
- Call no.:
- P63600/6172
- Type:
- Conference Proceedings
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