Dynamic analysis of a pressure sensor diaphragm coupled with an air-backed cavity [6166-41]
- Author(s):
- Publication title:
- Smart structures and materials 2006 : Modeling, signal processing, and control : 27 February-2 March 2006, San Diego, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6166
- Pub. Year:
- 2006
- Page(from):
- 616614
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819462190 [0819462195]
- Language:
- English
- Call no.:
- P63600/6166
- Type:
- Conference Proceedings
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