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Layout optimization for multilayer overlay targets [6155-14]

Author(s):
Binns, L. A. ( Accent Optical Technologies Ltd. (Unnited Kingdom) )
Smith, N. P. ( Accent Optical Technologies (Taiwan) )
Ausschnitt, C. P. ( IBM Microelectronics Division (USA) )
Morningstar, J. ( IBM Microelectronics Division (USA) )
Muth, W. ( IBM Microelectronics Division (USA) )
Schneider, J. ( IBM Microelectronics Division (USA) )
Yerdon, R. ( IBM Microelectronics Division (USA) )
2 more
Publication title:
Data analysis and modeling for process control III : 23 February, 2006, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6155
Pub. Year:
2006
Page(from):
61550F
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461988 [0819461989]
Language:
English
Call no.:
P63600/6155
Type:
Conference Proceedings

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