Drag-a-drop: a characterization tool for immersion lithography [6154-182]
- Author(s):
- Bassett D W ( The Univ of Texas at Austin (USA) )
- Taylor J C ( The Univ of Texas at Austin (USA) )
- Conley W ( Freescale Semiconductor Inc (USA) )
- Willson C G ( The Univ of Texas at Austin (USA) )
- Bonnecaze R T ( The Univ of Texas at Austin (USA) )
- Publication title:
- Optical Microlithography XIX
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6154
- Pub. Year:
- 2006
- Pt.:
- 3
- Page(from):
- 61544P
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461971 [0819461970]
- Language:
- English
- Call no.:
- P63600/6154
- Type:
- Conference Proceedings
Similar Items:
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
10
Conference Proceedings
Advances in TFE-based fluoropolymers for 157-nm lithography: a progress report
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
Characterization. of imaging performance for immersion lithography at NA=0.93 [6154-05]
SPIE - The International Society of Optical Engineering |
11
Conference Proceedings
Experimental characterization of the receding meniscus under conditions associated with immersion lithography [6154-27]
SPIE - The International Society of Optical Engineering |
6
Conference Proceedings
Using scanning electrochemical microscopy to probe chemistry at the solid-liquid interface in chemically amplified immersion lithography
SPIE - The International Society of Optical Engineering |
American Institute of Chemical Engineers |