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Intelligent model-based OPC [6154-121]

Author(s):
Huang, W. C. ( Taiwan Semiconductor Manufacturing Co. (Taiwan) )
Lai, C. M. ( Taiwan Semiconductor Manufacturing Co. (Taiwan) )
Luo, B. ( Taiwan Semiconductor Manufacturing Co. (Taiwan) )
Tsai, C. K ( Taiwan Semiconductor Manufacturing Co. (Taiwan) )
Chin, M. H. ( Taiwan Semiconductor Manufacturing Co. (Taiwan) )
Lai, C. W. ( Taiwan Semiconductor Manufacturing Co. (Taiwan) )
Kuo, C. C. ( Taiwan Semiconductor Manufacturing Co. (Taiwan) )
Liu, R. G. ( Taiwan Semiconductor Manufacturing Co. (Taiwan) )
Lin, H. T. ( Taiwan Semiconductor Manufacturing Co. (Taiwan) )
4 more
Publication title:
Optical Microlithography XIX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6154
Pub. Year:
2006
Pt.:
3
Page(from):
615436
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461971 [0819461970]
Language:
English
Call no.:
P63600/6154
Type:
Conference Proceedings

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