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Simulation of dense contact hole (K1=O.35) arrays with 193-nm immersion lithography [6154-106]

Author(s):
  • Raub, A. K. ( Ctr for High Technology Materials, Univ. of New Mexico (USA) and Univ. of New Mexiso (USA) )
  • Biswas, A. M ( Ctr for High Technology Materials, Univ. of New Mexico (USA) and Univ. of New Mexiso (USA) )
  • Borodovsky, Y. ( Intel Corp. (USA) )
  • Allen, G. ( Intel Corp. (USA) )
  • Brueck, S. R. J. ( Ctr. for Hig Technology Mateerials, Univ, of New Mexico (USA) and Univ. of New Mexico (USA) )
Publication title:
Optical Microlithography XIX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6154
Pub. Year:
2006
Pt.:
2
Page(from):
61542U
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461971 [0819461970]
Language:
English
Call no.:
P63600/6154
Type:
Conference Proceedings

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