Immersion effects on lithography system performance [6154-30]

Immersion effects on lithography system performance [6154-30]

Author(s):

Nagahara, S. ( NEC Electronics Corp. (Japan) and IMEC (Belgium) )

Pollentier, I. ( IMEC (Belgium) )

Machida, T. ( Renesas Technology (Japan) and IMEC (Belgium) )

O’Brien, S. ( Texas Instruments (USA) and IMEC (Belgium) )

Jacobs, E. ( ASML (Netherlands) and IMEC (Belgium) )

Schaap, C. ( ASML (Netherlands) and IMEC (Belgium) )

Leroy, P. ( IMEC (Belgium) )

Storms, G. ( IMEC (Belgium) )

Nafus, K. ( Tokyo Electron (Japan) and IMEC (Belgium) )

Laidler, D. ( IMEC (Belgium) )

Cheng, S.

6 more

Publication title:

Optical Microlithography XIX

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6154

Pub. Year:

2006

Pt.:

1

Page(from):

61540U

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819461971 [0819461970]

Language:

English

Call no.:

P63600/6154

Type:

Conference Proceedings

Details

TDL ID:	ZA00016186
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Optical Microlithography
Conf. info. (Number):	2006 : 19th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2006.02.21-2006.02.24

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