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Laser-induced oxidation of metallic thin films as a method for creating grayscale photomasks [6153-169]

Author(s):
Chapman, G. H. ( Simon Fraser Univ. (Canada) )
Tu Y ( Simon Fraser Univ. (Canada) )
Choo C ( Simon Fraser Univ. (Canada) )
Wang J ( Simon Fraser Univ. (Canada) )
Poon D K ( Simon Fraser Univ. (Canada) )
Chang M ( Simon Fraser Univ. (Canada) )
1 more
Publication title:
Advances in Resist Technology and Processing XXIII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6153
Pub. Year:
2006
Pt.:
2
Page(from):
61534G
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461964 [0819461962]
Language:
English
Call no.:
P63600/6153
Type:
Conference Proceedings

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