Newly developed RELACS materials and processes for the 65 nm node and beyond [6153-92]
- Author(s):
Terai, M ( Mitsubishi Electric Corp. (Japan) ) Kumada, T. ( Mitsubishi Electric Corp. (Japan) ) Ishibashi, T. ( Renesas Technology Corp. (Japan) ) Hanawa, T. ( Renesas Technology Corp. (Japan) ) Satake, N. ( AZ Electronic Materials K. K. (Japan) ) Takano, Y. ( AZ Electronic Materials K. K. (Japan) ) - Publication title:
- Advances in Resist Technology and Processing XXIII
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6153
- Pub. Year:
- 2006
- Pt.:
- 2
- Page(from):
- 61532I
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461964 [0819461962]
- Language:
- English
- Call no.:
- P63600/6153
- Type:
- Conference Proceedings
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