Studies on immersion defects using mimic immersion experiments [6153-61]
- Author(s):
Hanawa, T ( Renesas Technology Corp (Japan) ) Suganaga, T ( Renesas Technology Corp (Japan) ) Ishibashi, T ( Renesas Technology Corp (Japan) ) Maejima, S ( Renesas Technology Corp (Japan) ) Narimatsu, K ( Renesas Technology Corp (Japan) ) Suko, K ( Renesas Technology Corp (Japan) ) Terai, M ( Mitsubishi Electric (Japan) ) Kumada, T ( Mitsubishi Electric (Japan) ) Kitano, J ( Tokyo Electron Kyushu Ltd (Japan) ) - Publication title:
- Advances in Resist Technology and Processing XXIII
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6153
- Pub. Year:
- 2006
- Pt.:
- 1
- Page(from):
- 61531O
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461964 [0819461962]
- Language:
- English
- Call no.:
- P63600/6153
- Type:
- Conference Proceedings
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