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Studies on immersion defects using mimic immersion experiments [6153-61]

Author(s):
Hanawa, T ( Renesas Technology Corp (Japan) )
Suganaga, T ( Renesas Technology Corp (Japan) )
Ishibashi, T ( Renesas Technology Corp (Japan) )
Maejima, S ( Renesas Technology Corp (Japan) )
Narimatsu, K ( Renesas Technology Corp (Japan) )
Suko, K ( Renesas Technology Corp (Japan) )
Terai, M ( Mitsubishi Electric (Japan) )
Kumada, T ( Mitsubishi Electric (Japan) )
Kitano, J ( Tokyo Electron Kyushu Ltd (Japan) )
4 more
Publication title:
Advances in Resist Technology and Processing XXIII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6153
Pub. Year:
2006
Pt.:
1
Page(from):
61531O
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461964 [0819461962]
Language:
English
Call no.:
P63600/6153
Type:
Conference Proceedings

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