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Study of the effect of amine additives on LWR and LER [6153-44]

Author(s):
Houlihan, F. M. ( AZ Electronic Materials (USA) )
Rentkiewicz, D. ( AZ Electronic Materials (USA) )
Lin, G. ( AZ Electronic Materials (USA) )
Rahman, D. ( AZ Electronic Materials (USA) )
Mackenzie, D. ( AZ Electronic Materials (USA) )
Timko, A. ( AZ Electronic Materials (USA) )
Kudo, T. ( AZ Electronic Materials (USA) )
Anyadiegwu, C. ( AZ Electronic Materials (USA) )
Thiyagarajan, M. ( AZ Electronic Materials (USA) )
Chiu, S. ( AZ Electronic Materials (USA) )
Romano, A. ( AZ Electronic Materials (USA) )
Dammel, R. R. ( AZ Electronic Materials (USA) )
Padmanaban, M. ( AZ Electronic Materials (USA) )
8 more
Publication title:
Advances in Resist Technology and Processing XXIII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6153
Pub. Year:
2006
Pt.:
1
Page(from):
615317
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461964 [0819461962]
Language:
English
Call no.:
P63600/6153
Type:
Conference Proceedings

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