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AIM technology for non-volatile memories microelectronics devices [6152-175]

Author(s):
Rigoili, P. L. ( STMicroelectronics Sri (Italy) )
Rozzoni, L ( STMicroelectronics Sri (Italy) )
Turco, C ( STMicroelectronics Sri (Italy) )
Iessi, U ( STMicroelectronics Sri (Italy) )
Polli, M ( KLA-Tencor (Italy) )
Kassel, E ( KLA-Tencor (Italy) )
Izikson, P ( KLA-Tencor (Italy) )
Avrahamov, Y ( KLA-Tencor (Italy) )
3 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6152
Pub. Year:
2006
Pt.:
2
Page(from):
61524C
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461957 [0819461954]
Language:
English
Call no.:
P63600/6152
Type:
Conference Proceedings

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