Comparison of I-line and DUV high-energy implant litho processes [6152-155]
- Author(s):
- Grandpierre, A G. ( Infineon Technologies SC300 GmbH &Co. OHG (Germany) )
- Berger, C. ( Infineon Technologies SC300 GmbH &Co. OHG (Germany) )
- Schroeder, U. P. ( Infineon Technologies North America (USA) )
- Schiwon, R. ( Infineon Technologies SC300 GmbH & Co. OHG (Germany) )
- Kubis, M. ( Infineon Technologies SC300 GmbH & Co. OHG (Germany) )
- Publication title:
- Metrology, Inspection, and Process Control for Microlithography XX
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6152
- Pub. Year:
- 2006
- Pt.:
- 2
- Page(from):
- 61523V
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461957 [0819461954]
- Language:
- English
- Call no.:
- P63600/6152
- Type:
- Conference Proceedings
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