Kohler illumination for high-resolution optical metrology [6152-152]

Author(s):

Sohn, Y. J. ( National Institute of Standards and Technology (USA) )

Barnes, B. M ( National Institute of Standards and Technology (USA) )

Howard, L. ( National Institute of Standards and Technology (USA) )

Silver, R. ( National Institute of Standards and Technology (USA) )

Attofa, R. ( National Institute of Standards and Technology (USA) )

Stocker, M. T. ( National Institute of Standards and Technology (USA) )

1 more

Publication title:

Metrology, Inspection, and Process Control for Microlithography XX

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6152

Pub. Year:

2006

Pt.:

2

Page(from):

61523S

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819461957 [0819461954]

Language:

English

Call no.:

P63600/6152

Type:

Conference Proceedings