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High-throughput contact critical dimension and gray level value measurement [6152-143]

Author(s):
Xiao, H. ( Hermes Microvison, Inc. (USA) )
Fang, W. ( Hermes Microvison, Inc. (USA) )
Zhao, Y. ( Hermes Microvison, Inc. (USA) )
Huang, M. ( Hermes Microvison, Inc. (USA) )
Wang, D. ( Hermes Microvison, Inc. (USA) )
Wong, D. ( Hermes Microvison, Inc. (USA) )
Jau, J. ( Hermes Microvison, Inc. (USA) )
2 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6152
Pub. Year:
2006
Pt.:
2
Page(from):
61523L
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461957 [0819461954]
Language:
English
Call no.:
P63600/6152
Type:
Conference Proceedings

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