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Carbon nanotube AFM probes for microlithography process control [6152-115]

Author(s):
Liu, H. C ( Veeco Instruments, Inc. (USA) )
Fong, D. ( Veeco Instruments, Inc. (USA) )
Dahlen, G. A. ( Veeco Instruments, Inc. (USA) )
Osborn, M. ( Veeco Instruments, Inc. (USA) )
Hand, S. ( Veeco Instruments, Inc. (USA) )
Osborne, J. R. ( Veeco Instruments, Inc. (USA) )
1 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6152
Pub. Year:
2006
Pt.:
2
Page(from):
61522Y
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461957 [0819461954]
Language:
English
Call no.:
P63600/6152
Type:
Conference Proceedings

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