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In-chip overlay metrology [6152-40]

Author(s):
Ku, Y. S. ( Industrial technology Research Institute (Taiwan) )
Tung, C. H. ( Industrial technology Research Institute (Taiwan) )
Li, Y. P. ( Industrial technology Research Institute (Taiwan) )
Pang, H. L. ( Industrial technology Research Institute (Taiwan) )
Smith, N. P. ( Accent Optical Technologies (Taiwan) )
Binns, L. ( Accent Optical Technologies (UK) Ltd (United Kingdom) )
Rigden, T. ( Accent Optical Technologies (UK) Ltd (United Kingdom) )
Reynolds, G. ( Accent Optical Technologies (UK) Ltd (United Kingdom) )
Fink, H. ( Accent Optical Technologies (UK) Ltd (United Kingdom) )
4 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6152
Pub. Year:
2006
Pt.:
1
Page(from):
615214
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461957 [0819461954]
Language:
English
Call no.:
P63600/6152
Type:
Conference Proceedings

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