Carbon nanotube probes for three-dimensional critical-dimension metrology [6152-84]
- Author(s):
- Park, B. C. ( Korea Research Institute of Standards and Science (South Korea) )
- Ahn, S. J. ( Korea Research Institute of Standards and Science (South Korea) )
- Choi, J. ( Korea Research Institute of Standards and Science (South Korea) )
- Jung, K. Y. ( Nanofocus (South Korea) )
- Song,W. Y. ( Nanofocus (South Korea) )
- Publication title:
- Metrology, Inspection, and Process Control for Microlithography XX
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6152
- Pub. Year:
- 2006
- Pt.:
- 1
- Page(from):
- 61520R
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461957 [0819461954]
- Language:
- English
- Call no.:
- P63600/6152
- Type:
- Conference Proceedings
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