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Design-driven metrology: a new paradigm for DFM-enabled process characterization and control, extensibility, and limitations (Invited Paper) [6152-01]

Author(s):
Capodieci, L. ( Advanced Micro Devices (USA) )  
Publication title:
Metrology, Inspection, and Process Control for Microlithography XX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6152
Pub. Year:
2006
Pt.:
1
Page(from):
615201
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461957 [0819461954]
Language:
English
Call no.:
P63600/6152
Type:
Conference Proceedings

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