High-temperature LPP collector mirror [6151-152]
- Author(s):
Feigl, T. ( Fraunhofer IOF (Germany) ) Yulin,S. ( Fraunhofer IOF (Germany) ) Benoit, N. ( Fraunhofer IOF (Germany) ) Kaiser,N. ( Fraunhofer IOF (Germany) ) Bowering, N. R. ( Cymer Inc. (USA) ) Ershov,A.I. ( Cymer Inc. (USA) ) Khodykin,O. V. ( Cymer Inc. (USA) ) Viatella, J. W. ( Cymer Inc. (USA) ) Bruzzone,K.A. ( Cymer Inc. (USA) ) Fomenkov, I. V. ( Cymer Inc. (USA) ) Myers.D.W ( Cymer Inc. (USA) ) - Publication title:
- Emerging Lithographic Technologies X
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6151
- Pub. Year:
- 2006
- Pt.:
- 2
- Page(from):
- 61514A
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461940 [0819461946]
- Language:
- English
- Call no.:
- P63600/6151
- Type:
- Conference Proceedings
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