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Study of the dynamic evolution and spectral properties of multi-component plasmas for EUV production [6151-147]

Author(s):
Spencer, J. B. ( Univ. of Illinois at Urbana-Champaign (USA) )
Srivastava, S. N. ( Univ. of Illinois at Urbana-Champaign (USA) )
Alman, D. A. ( Univ. of Illinois at Urbana-Champaign (USA) )
Antonsen, E. L. ( Univ. of Illinois at Urbana-Champaign (USA) )
Ruzic, D. N. ( Univ. of Illinois at Urbana-Champaign (USA) )
MacFarlane, J. J. ( Prism Computational Sciences (USA) )
1 more
Publication title:
Emerging Lithographic Technologies X
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6151
Pub. Year:
2006
Pt.:
2
Page(from):
615146
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461940 [0819461946]
Language:
English
Call no.:
P63600/6151
Type:
Conference Proceedings

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