Advanced image placement performance for the current EPL masks [6151-53]
- Author(s):
Eguchi, H. ( Toppan Printing Co., Ltd. (Japan) ) Sugimura, H. ( Toppan Printing Co., Ltd. (Japan) ) Koike, K. ( Semiconductor Leading Edge Technologies, Inc. (Japan) ) Sakaue, H. ( Semiconductor Leading Edge Technologies, Inc. (Japan) ) Arimoto, H. ( Semiconductor Leading Edge Technologies, Inc. (Japan) ) Ogawa, K. ( Toppan Printing Co., Ltd. (Japan) ) Susa, T. ( Toppan Printing Co., Ltd. (Japan) ) Kunitani, S. ( Toppan Printing Co., Ltd. (Japan) ) Kurosu, T. ( Toppan Printing Co., Ltd. (Japan) ) Yoshii, T. ( Toppan Printing Co., Ltd. (Japan) ) Itoh, K. ( Toppan Printing Co., Ltd (Japan) ) - Publication title:
- Emerging Lithographic Technologies X
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6151
- Pub. Year:
- 2006
- Pt.:
- 1
- Page(from):
- 61511G
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461940 [0819461946]
- Language:
- English
- Call no.:
- P63600/6151
- Type:
- Conference Proceedings
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