The role of stress in nanoimprint lithography [6151-43]
- Author(s):
Ro, H. W. ( National Institute of Standards and Technology (USA) ) Ding, Y. ( National Institute of Standards and Technology (USA) ) Lee, H. J. ( National Institute of Standards and Technology (USA) ) Hines, D. R. ( Univ. of Maryland, College Park (USA) ) Jones, R. L. ( National Institute of Standards and Technology (USA) ) Lin, E. K. ( National Institute of Standards and Technology (USA) ) Karim, A. ( National Institute of Standards and Technology (USA) ) Wu, W. ( National Institute of Standards and Technology (USA) ) - Publication title:
- Emerging Lithographic Technologies X
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6151
- Pub. Year:
- 2006
- Pt.:
- 1
- Page(from):
- 615116
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461940 [0819461946]
- Language:
- English
- Call no.:
- P63600/6151
- Type:
- Conference Proceedings
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