Application of cellular neural networks in the measurement of Iinewidth and line edge roughness [6150-115]
- Author(s):
- Publication title:
- 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6150
- Pub. Year:
- 2006
- Pt.:
- 2
- Page(from):
- 61504S
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461896 [081946189X]
- Language:
- English
- Call no.:
- P63600/6150
- Type:
- Conference Proceedings
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