Application of cellular neural networks in the measurement of Iinewidth and line edge roughness [6150-115]

Application of cellular neural networks in the measurement of Iinewidth and line edge roughness [6150-115]

Author(s):

Li, H. ( Harbin Institute of Technology (China) )
Zhao, X. ( Harbin Institute of Technology (China) )
Chu, W. ( Harbin Institute of Technology (China) )
Li, N. ( Harbin Institute of Technology (China) )

Publication title:

2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6150

Pub. Year:

2006

Pt.:

2

Page(from):

61504S

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819461896 [081946189X]

Language:

English

Call no.:

P63600/6150

Type:

Conference Proceedings

Details

TDL ID:	ZA00016182
Series ID:	PA00000029
Conf. info. (Name):	International Symposium on Advanced Optical Manufacturing and Testing Technologies
Conf. info. (Number):	2005 : 2nd
Conf. info. (Venue):	Xian, China
Conf. info. (Date):	2005.11.02-2005.11.05

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