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Development of user-friendly software for the roughness measurement of ultrasmooth surface [6150-34]

Author(s):
  • Li, H. ( Tsinghua Univ. (China) )
  • Li, Y. ( Tsinghua Univ. (China) )
  • Li, Q. ( Tsinghua Univ. (China) )
  • Liao, X. ( Tsinghua Univ. (China) )
  • Zheng, J. ( Tsinghua Univ. (China) )
Publication title:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6150
Pub. Year:
2006
Pt.:
1
Page(from):
61502I
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461896 [081946189X]
Language:
English
Call no.:
P63600/6150
Type:
Conference Proceedings

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