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Highly reflective optical coatings for high-power applications of micro scanning mirrors in the UV-VIS-NIR spectral region (Invited Paper) [6114-19]

Author(s):
Sandner, T. ( Fraunhofer Institute of Photonic Microsystems (Germany) )
Schmidt, J. U. ( Fraunhofer Institute of Photonic Microsystems (Germany) )
Schenk, H. ( Fraunhofer Institute of Photonic Microsystems (Germany) )
Lakner, H. ( Fraunhofer Institute of Photonic Microsystems (Germany) )
Yang, M. ( Fraunhofer IOF (Germany) )
Gatto, A. ( Fraunhofer IOF (Germany) )
Kaiser, N. ( Fraunhofer IOF (Germany) )
Braun, S. ( Fraunhofer IWS (Germany) )
Foltyn, T. ( Fraunhofer IWS (Germany) )
Leson, A.
5 more
Publication title:
MOEMS Display, Imaging, and Miniaturized Microsystems IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6114
Pub. Year:
2006
Page(from):
61140H
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461568 [0819461563]
Language:
English
Call no.:
P63600/6114
Type:
Conference Proceedings

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