Principle and applications of a new MOEMS spectrometer [6114-11]

Principle and applications of a new MOEMS spectrometer [6114-11]

Author(s):

Otto T ( Fraunhofer Institute for Reliabililty and Microintegration (Germany) )

Saupe R ( Chemnitz Univ of Technology (Germany) )

Weiss A ( Chemnitz Univ of Technology (Germany) )

Stock V ( COLOUR CONTROL Farbmesstechnik GmbH (Germany) )

Bruch R ( Nanolife (Germany) )

Gessner T ( Fraunhofer Institute for Reliability and Microintegration (Germany) and Chemnitz Univ of Technology (Germany) )

1 more

Publication title:

MOEMS Display, Imaging, and Miniaturized Microsystems IV

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6114

Pub. Year:

2006

Page(from):

611409

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819461568 [0819461563]

Language:

English

Call no.:

P63600/6114

Type:

Conference Proceedings

Details

TDL ID:	ZA00016148
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : MOEMS Display, Imaging, and Miniaturized Microsystems
Conf. info. (Number):	2006 : 4th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2006.01.25-2006.01.26

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