MEMS actuated deformable mirror [6113-25]

MEMS actuated deformable mirror [6113-25]

Author(s):

Papavasiliou, A. ( Lawrence Livermore National Lab. (USA) )
Olivier, S. ( Lawrence Livermore National Lab. (USA) )
Barbee, T. ( Lawrence Livermore National Lab. (USA) )
Walton, C. ( Lawrence Livermore National Lab. (USA) )
Cohn, M. ( MicroAssembly Technologies (USA) )

Publication title:

MEMS/MOEMS Components and Their Applications III

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6113

Pub. Year:

2006

Page(from):

61130P

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819461551 [0819461555]

Language:

English

Call no.:

P63600/6113

Type:

Conference Proceedings

Details

TDL ID:	ZA00016147
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : MEMS/MOEMS Components and Their Applications
Conf. info. (Number):	2006 : 3rd
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2006.01.23-2006.01.25

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