Hermeticity tests on organically sealed micro-packages using FTIR spectroscopy [6111-31]

Hermeticity tests on organically sealed micro-packages using FTIR spectroscopy [6111-31]

Author(s):

Roux, J.-L. ( CNES-French Space Agency (France) )
Pressecq, F. ( CNES-French Space Agency (France) )
Tetelin, A. ( Univ. Bordeaux 1 (France) )
Pellet, C. ( Univ. Bordeaux 1 (France) )
IXL, ( Univ. Bordeaux 1 (France) )

Publication title:

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6111

Pub. Year:

2006

Page(from):

61110R

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819461537 [0819461539]

Language:

English

Call no.:

P63600/6111

Type:

Conference Proceedings

Details

TDL ID:	ZA00016145
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS
Conf. info. (Number):	2006 : 5th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2006.01.25-2006.01.26

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