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Novel combined low-coherence interferometry spectrally resolved reflectometry compatible with high-resolution Raman spectroscopy for nondestructive characterization of MEMS・ structures [6111-26]

Author(s):
Walecki, W. J. ( Frontier Semiconductor Inc. (USA) )
Azfar, T. ( Frontier Semiconductor Inc. (USA) )
Pravdivstev, A. ( Frontier Semiconductor Inc. (USA) )
SantosII, M. ( Frontier Semiconductor Inc. (USA) )
Wong, T. ( Frontier Semiconductor Inc. (USA) )
Feng, A. ( Frontier Semiconductor Inc. (USA) )
Koo, A. ( Frontier Semiconductor Inc. (USA) )
2 more
Publication title:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6111
Pub. Year:
2006
Page(from):
61110M
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461537 [0819461539]
Language:
English
Call no.:
P63600/6111
Type:
Conference Proceedings

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