A transient charging model to predict actuation-voltage shift in RF-MEMS capacitive switches [6111-20]

A transient charging model to predict actuation-voltage shift in RF-MEMS capacitive switches [6111-20]

Author(s):

Yuan, X. ( Lehigh Univ. (USA) )
Hwang, J. C. M. ( Lehigh Univ. (USA) )
Forehand, D. ( MEMtronics Corp. (USA) )
Goldsmith, C. L. ( MEMtronics Corp. (USA) )

Publication title:

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6111

Pub. Year:

2006

Page(from):

61110G

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819461537 [0819461539]

Language:

English

Call no.:

P63600/6111

Type:

Conference Proceedings

Details

TDL ID:	ZA00016145
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS
Conf. info. (Number):	2006 : 5th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2006.01.25-2006.01.26

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