Experimental and computational study on laser heating of surface micromachined cantilevers [6111-09]
- Author(s):
- Phinney, L. M. ( Sandia National Labs (USA) )
- Spahn. O. B. ( Sandia National Labs (USA) )
- Wong, C. C. ( Sandia National Labs (USA) )
- Publication title:
- Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6111
- Pub. Year:
- 2006
- Page(from):
- 611108
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461537 [0819461539]
- Language:
- English
- Call no.:
- P63600/6111
- Type:
- Conference Proceedings
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