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Fatigue of polycrystalline silicon films with thin surface oxides [6111-07]

Author(s):
Publication title:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6111
Pub. Year:
2006
Page(from):
611106
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461537 [0819461539]
Language:
English
Call no.:
P63600/6111
Type:
Conference Proceedings

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