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Process design and tracking support for MEMS [6109-08]

Author(s):
Wagener, A. ( Univ. of Siegen (Germany) )
Schmidt, T. ( Univ. of Siegen (Germany) )
Popp, J. ( Univ. of Siegen (Germany) )
Hahn, K. ( Univ. of Siegen (Germany) )
Bruck, R. ( Univ. of Siegen (Germany) )
Ortloff, D. ( Cavendish Kinetics (Netherlands) )
1 more
Publication title:
Micromachining and Microfabrication Process Technology XI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6109
Pub. Year:
2006
Page(from):
610908
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461513 [0819461512]
Language:
English
Call no.:
P63600/6109
Type:
Conference Proceedings

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