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Crossed beam irradiation for femtosecond laser micro and nanomachining with threedimensionally isotropic spatial resolution (Invited Paper) [6108-27]

Author(s):
  • Sugioka, K. ( RIKEN-The Institute of Physical and Chemical Research (Japan) )
  • Midorikawa, K. ( RIKEN-The Institute of Physical and Chemical Research (Japan) )
Publication title:
Commercial and biomedical applications of ultrafast lasers VI : 22-25 January 2006, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6108
Pub. Year:
2006
Page(from):
61080S
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461506 [0819461504]
Language:
English
Call no.:
P63600/6108
Type:
Conference Proceedings

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