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Femtosecond Iaser Iithography and applications (Invited Paper) [6106A-40]

Author(s):
Chichkov, B. N. ( Laser Zentrum Hannover e.V. (Germany) )
Fadeeva, E. ( Laser Zentrum Hannover e.V. (Germany) )
Koch, J. ( Laser Zentrum Hannover e.V. (Germany) )
Ostendorf, A. ( Laser Zentrum Hannover e.V. (Germany) )
Ovsianikov, A. ( Laser Zentrum Hannover e.V. (Germany) )
Passinger, S. ( Laser Zentrum Hannover e.V. (Germany) )
Reinhardt, C. ( Laser Zentrum Hannover e.V. (Germany) )
2 more
Publication title:
Photon Processing in Microelectronics and Photonics V
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6106
Pub. Year:
2006
Page(from):
610612
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461483 [0819461482]
Language:
English
Call no.:
P63600/6106
Type:
Conference Proceedings

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