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Laser treatment of micro-components’ surface for improved tribological applications [6106A-35]

Author(s):
  • Ye K ( Data Storage Institute (singapore) )
  • Goh Y W ( Data Storage Institute (singapore) )
  • Cheng C T ( Sony Singapore Research Lab ( Singapore) )
  • Yeo C B ( Sony Singapore Research Lab ( Singapore) )
  • Hong M ( Data Storage Institute (Singapore) )
Publication title:
Photon Processing in Microelectronics and Photonics V
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6106
Pub. Year:
2006
Page(from):
61060X
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461483 [0819461482]
Language:
English
Call no.:
P63600/6106
Type:
Conference Proceedings

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