Real-time optical characterization of laser oxidation process in bimetallic direct write gray scale photomasks [6106A-18]
- Author(s):
Poon, D. K. ( Simon Fraser Univ. (Canada) ) Chapman, G. H. ( Simon Fraser Univ. (Canada) ) Choo, C. ( Simon Fraser Univ. (Canada) ) Chang, M. ( Simon Fraser Univ. (Canada) ) Wang, J. ( Simon Fraser Univ. (Canada) ) Tu, Y. ( Simon Fraser Univ. (Canada) ) - Publication title:
- Photon Processing in Microelectronics and Photonics V
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6106
- Pub. Year:
- 2006
- Page(from):
- 61060G
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461483 [0819461482]
- Language:
- English
- Call no.:
- P63600/6106
- Type:
- Conference Proceedings
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