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Laster-induced oxidation of Zn alloy films for direct-write grayscale photomasks [6106A-17]

Author(s):
Wang, J. ( Simon Fraser Univ. (Canada) )
Chang, M. ( Univ. of California, Berkeley (USA) )
Tu, Y. ( Univ. of California, Berkeley (USA) )
Poon, D. K. ( Univ. of California, Berkeley (USA) )
Chapman, G. H. ( Univ. of California, Berkeley (USA) )
Choo, C. ( Univ. of California, Berkeley (USA) )
Peng, J. ( Univ. of California, Berkeley (USA) )
2 more
Publication title:
Photon Processing in Microelectronics and Photonics V
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6106
Pub. Year:
2006
Page(from):
61060F
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461483 [0819461482]
Language:
English
Call no.:
P63600/6106
Type:
Conference Proceedings

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