High-sensitivity 2.5-um pixel CMOS image sensor realized using Cu interconnect layers [6068-11]
- Author(s):
Tatani, K. ( Sony Corp. (Japan) ) Enomoto, Y. ( Sony Corp. (Japan) ) Yamamoto, A. ( Sony Corp. (Japan) ) Goto, T. ( Sony Corp. (Japan) ) Abe, H. ( Sony Corp. (Japan) ) Hirayama, T. ( Sony Corp. (Japan) ) - Publication title:
- Sensors, Cameras, and Systems for Scientific/Industrial Applications VII
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6068
- Pub. Year:
- 2006
- Page(from):
- 606809
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461087 [0819461083]
- Language:
- English
- Call no.:
- P63600/6068
- Type:
- Conference Proceedings
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