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Sio2 etching for optical device using pulse-modulated elctron-beam-excited plasma [6050-30]

Author(s):
Publication title:
Optomechatronic Micro/Nano Devices and Components
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6050
Pub. Year:
2005
Page(from):
60500W
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460868 [0819460869]
Language:
English
Call no.:
P63600/6050
Type:
Conference Proceedings

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