Piezo actuators for optomechatronics: Abstract Only
- Author(s):
- Higuchi T. ( The univ. of Tokyo (Japan) )
- Publication title:
- Optomechatronic Micro/Nano Devices and Components
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6050
- Pub. Year:
- 2005
- Page(from):
- xiii
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819460868 [0819460869]
- Language:
- English
- Call no.:
- P63600/6050
- Type:
- Conference Proceedings
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