Study on the packaging integrity testing for polymer micro-device [6040-10]
- Author(s):
- Publication title:
- ICMIT 2005: mechatronics, MEMS, and smart materials : 20-23 September 2005, Changchun, China
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6040
- Pub. Year:
- 2005
- Page(from):
- 60400A
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819460721 [0819460729]
- Language:
- English
- Call no.:
- P63600/6040
- Type:
- Conference Proceedings
Similar Items:
SPIE - The International Society of Optical Engineering |
7
Conference Proceedings
Experimental Investigation on Heat Transfer and Pressure Drop in a Microtubine Recuperator With Cross-Wavy Primary Surface Channels
American Society of Mechanical Engineers |
2
Conference Proceedings
A hybird micro-accelerometer system with CMOS readout circuit and self-test function [6040-04]
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
3
Conference Proceedings
Wavelet package frequency-band energy ratios of human EEG signals in sleeping [6040-66]
SPIE - The International Society of Optical Engineering |
9
Conference Proceedings
Research on equipment of micro-pressure measure and control in loading experiment plant cell machanics [6040-61]
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
Trans Tech Publications |
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Laser-Assisted Waterjet Micro-Grooving of Silicon Wafers for Minimizing Heat Affected Zone
Trans Tech Publications |
6
Conference Proceedings
CAD/CAM interface design of excimer laser micro-processing system [6040-12]
SPIE - The International Society of Optical Engineering |
12
Conference Proceedings
Plasma polymerization and microfabrication of electroactive polymers and carbon nanotubes
SPIE-The International Society for Optical Engineering |